Brands：PNC
Ultron B300 Series
Technology Performance
• Modular design
• Optimized transmission mechanism, Max WPH > 600
• Smaller footprint
• High stability
Key Application
• Gate Oxide Pre clean
• RCA clean
• PR strip
• Oxide etch
• CoSix Selective Etch
• Nitride Removal
• Wafer(Poly/Oxide) Recycle
Ultron S300 Series
Technology Performance
• Small floor area
• Modular design
• A variety of chemicals
• The particle removal effect is good
• Sulfuric can be recycled
Key Application
• Pre-clean
•Metal Recycle
• NiPt strip
• Backside clean
• BEOL Polymer Removal
• PR strip (H2SO4 recycle)
Ultron B200 Series
Technology Performance
• Small floor space
• High wafer output
• Optimized air and tank flow field
• Good Particle Performance
• Good Uniformity Performance
Key Application
• Gate Oxide Pre Clean
• RCA clean
• PR strip
• Oxide etch
• Nitride Removal
• Solvent Clean
• Wafer Recycle