廠務系統工程

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","pureSummary":" 廠務系統工程 ","description":"

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氣體的使用在半導體製程中一直扮演著重要的角色，特別是半導體製程目前已被廣泛的應用於各項產業。氣體一般區分為大宗氣體Bulk Gas，例如 N2、H2、O2、Ar 等使用量較大的氣體，和特殊氣體Specialty Gas，例如 SiH4、PH3…等供應的氣體。和淞科技氣瓶櫃通過了 SEMI S2 認證的相關要求，並提供氣體供應系統之各項設備，產品線包含 VMB、VMP、VDB、VDP、Gas Cabinet、Gas Rack、Purifier Box 及 Scrubber。以上所有產品皆可以依照客戶需求量身訂作，依照各種氣體特性不同，給予相關氣體特性諮詢，並提供完整且最有效率的解決方案（Total Solution）。

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大宗氣體供應系統

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Bulk Gas System

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一般的大宗氣體 N2、O2、Ar 常用的供應方式以固定式的大型桶槽為主，以槽車定期進行填灌，高壓的液態氣體經蒸發器蒸發為氣態後，供應現場使用，若有純化的需求則需透過氣體純化器將氣體精製成生產線需求的規格使用。

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特殊氣體供應系統

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Specialty Gas System

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特氣供應系統是半導體廠中危險性最高的一環，只要有任何的疏失都可能造成人員、廠房、設備的嚴重損失，例如 SiH4的自燃性，只要一洩漏就會與空氣中的氧氣起劇烈反應，開始燃燒，所以對於系統設計安全性的要求就特別高。

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","pureDescription":" 氣體的使用在半導體製程中一直扮演著重要的角色，特別是半導體製程目前已被廣泛的應用於各項產業。氣體一般區分為大宗氣體Bulk Gas，例如 N2、H2、O2、Ar 等使用量較大的氣體，和特殊氣體Specialty Gas，例如 SiH4、PH3…等供應的氣體。和淞科技氣瓶櫃通過了 SEMI S2 認證的相關要求，並提供氣體供應系統之各項設備，產品線包含 VMB、VMP、VDB、VDP、Gas Cabinet、Gas Rack、Purifier Box 及 Scrubber。以上所有產品皆可以依照客戶需求量身訂作，依照各種氣體特性不同，給予相關氣體特性諮詢，並提供完整且最有效率的解決方案（Total Solution）。大宗氣體供應系統Bulk Gas System 一般的大宗氣體 N2、O2、Ar 常用的供應方式以固定式的大型桶槽為主，以槽車定期進行填灌，高壓的液態氣體經蒸發器蒸發為氣態後，供應現場使用，若有純化的需求則需透過氣體純化器將氣體精製成生產線需求的規格使用。特殊氣體供應系統Specialty Gas System 特氣供應系統是半導體廠中危險性最高的一環，只要有任何的疏失都可能造成人員、廠房、設備的嚴重損失，例如 SiH4的自燃性，只要一洩漏就會與空氣中的氧氣起劇烈反應，開始燃燒，所以對於系統設計安全性的要求就特別高。 ","thumb":{"url":"https://images.yep.com.tw/thumbnai/665695dd6c2c3/d","width":1000,"height":780},"images":[{"url":"https://images.yep.com.tw/thumbnai/665695dd6c2c3/","main":false,"width":1000,"height":780}],"specify":false,"variants":[{"variantId":"6653ff6d5ff32","originalPrice":0,"price":0,"label":"-","quantity":0,"images":{"url":"","width":0,"height":0}}],"category":[{"root":16952,"self":16952}],"keywords":[],"seo":{"title":"氣體供應系統 Gas Distribution System - 和淞科技股份有限公司","description":"氣體供應系統 Gas Distribution System最新優惠與新品資訊推薦，氣體供應系統 Gas Distribution System網路年度人氣商品，提供氣體供應系統 Gas Distribution System各式規格、種類與熱門品牌，擁有氣體供應系統 Gas Distribution System最佳品質與折扣優惠，歡迎至和淞科技股份有限公司比價選購。"}},{"id":"2cd60f00-1bda-11ef-816f-bddd0aef6c5f","name":"特氣分流閥箱（盤）VMB/VMP","summary":"

廠務系統工程

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產品廠牌

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TPC

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","pureSummary":" 廠務系統工程產品廠牌 TPC ","description":"

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特氣分流閥箱（盤）Valve Manifold Box/Panel，簡稱VMB/VMP。為一個將特殊氣體分配盤安裝於箱體內的設計，主要用途為連接來自氣瓶櫃或大流量特氣分流箱的管路，調整壓力及流量後，分流出去給設備使用。具有抽氣、氮氣沖吹及排氣等安全功能。

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特氣分流器（閥組）VMB是將特殊氣體安全並安定的供應給半導體生產設備上的裝置。氣體之箱體平時保持負壓排氣，萬一在箱體內氣體盤面產生洩漏時，因有安全的排氣銜接至Scrubber，所以不會洩漏到箱體外部，也因此能夠防止人體吸入、爆炸火災等的災害的發生。VMB一般設置在無塵室內，將氣瓶櫃或大流量氣體分流箱供給來的半導體材料氣體區隔開來後，供應給製程裝置機台。另外，在VMB上也裝設了有N2 Purge Line使更換元件更安全，並可依客戶需求安裝UVIR，溫度警報、灑水頭等機能。

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","pureDescription":" 特氣分流閥箱（盤）Valve Manifold Box/Panel，簡稱VMB/VMP。為一個將特殊氣體分配盤安裝於箱體內的設計，主要用途為連接來自氣瓶櫃或大流量特氣分流箱的管路，調整壓力及流量後，分流出去給設備使用。具有抽氣、氮氣沖吹及排氣等安全功能。特氣分流器（閥組）VMB是將特殊氣體安全並安定的供應給半導體生產設備上的裝置。氣體之箱體平時保持負壓排氣，萬一在箱體內氣體盤面產生洩漏時，因有安全的排氣銜接至Scrubber，所以不會洩漏到箱體外部，也因此能夠防止人體吸入、爆炸火災等的災害的發生。VMB一般設置在無塵室內，將氣瓶櫃或大流量氣體分流箱供給來的半導體材料氣體區隔開來後，供應給製程裝置機台。另外，在VMB上也裝設了有N2 Purge Line使更換元件更安全，並可依客戶需求安裝UVIR，溫度警報、灑水頭等機能。 ","thumb":{"url":"https://images.yep.com.tw/thumbnai/665695dd5b411/d","width":1000,"height":780},"images":[{"url":"https://images.yep.com.tw/thumbnai/665695dd5b411/","main":false,"width":1000,"height":780}],"specify":false,"variants":[{"variantId":"6653ff8613fad","originalPrice":0,"price":0,"label":"-","quantity":0,"images":{"url":"","width":0,"height":0}}],"category":[{"root":16952,"self":16952}],"keywords":[],"seo":{"title":"特氣分流閥箱（盤）VMB/VMP - 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